

|
Model |
1302 Duo |
2010 Duo |
2020 Duo |
3020 Duo |
2020 Max |
3020 Max |
|||
|
image sensor |
5M CMOS |
20M CMOS |
|||||||
|
Type of lens |
Double telecentric lens |
||||||||
|
Light |
Ring |
Four-segment illumination (white light / green light) Light |
|||||||
|
Bottom |
Telecentric transmission illumination (green light) |
||||||||
|
Max. field |
High precision |
6 x 106 mm |
20 x 120 mm |
130×180 |
230x1380mm |
130x130mm |
230×130 mm |
||
|
Large field |
230×130 mm |
100×200 mm |
200 x 200 mm (4 angles R50) |
300 x 200 mm (4 angles R50) |
200 x 200 mm (4 angles R50) |
300 x 200 mm (4 angles R50) |
|||
|
Single field |
High precision |
6x6mm |
20 x 20 mm |
20 x 20 mm |
20 x 20 mm |
20 x 20 mm |
20 x 20 mm |
||
|
Large field |
20 x 20 mm |
100 x 100 mm (4 angles R50) |
100 x 100 mm (4 angles R50) |
100 x 100 mm (4 angles R50) |
100 x 100 mm (4 angles R50) |
100 x 100 mm (4 angles R50) |
|||
|
Magnification |
High precision |
0.8x |
0.4x |
0.4.x |
0.4.x |
0.4.x |
0.4x |
||
|
Large field |
0.4 x |
0.1x |
0.1x |
0.1x |
0.1x |
0.1x |
|||
|
Camera |
High precision |
3.2 um/pixel |
12 um/pixel |
12 um/pixel |
12 um/pixel |
6 um/pixel |
6 um/pixel |
||
|
Large field |
9.6 um/pixel |
48 um/pixel |
48 um/pixel |
48 um/pixel |
24 um/pixel |
24 um/pixel |
|||
%20(2).png)
OPTIV Scope software

Optical probe option for 3020 Duo and 3020 Max
|
|
2020 Max 3020 Max |
|
|
Measuring range (XxY) |
|
120 x 10 mm |
|
Max hole / depth ratio |
|
1.5 |
|
Beam diameter |
|
@38 um |
|
Resolution |
|
0.25 um |
|
Z- non movement |
Range (Z) |
+3.5um |
|
Accuracy |
+2.0um |
|
|
Z movement |
Range (Z) |
70mm |
|
Accuracy |
+(6+0.01H) um |
|